Journal Articles (peer-reviewed)

16.
Masahiro Mae, Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, “Multi-axis resonant filter design using frequency response data applied to industrial scan stage,” IEEE/ASME Transactions on Mechatronics, vol. 29, no. 4, pp. 2867–2876, 2024, doi: 10.1109/TMECH.2024.3402555.
15.
Yui Takaki Shirato, Wataru Ohnishi, Hiroshi Fujimoto, Yoichi Hori, Koichi Sakata, Atsushi Hara, “Effect of dead zone compensation by mass-flow-rate twin-drive system with anti-windup for pressure control system,” IEEJ Journal of Industry Applications, vol. 11, no. 2, pp. 299–307, 2022, doi: 10.1541/ieejjia.21005641.
14.
Masahiro Mae, Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, “Frequency response data-based peak filter design applied to MIMO large-scale high-precision scan stage,” Mechatronics, vol. 83, p. 102733, 2022, doi: 10.1016/j.mechatronics.2021.102733.
13.
白戸（高木）柚衣, 大西亘, 藤本博志, 堀洋一, 坂田晃一, 原篤史, “空気圧駆動システムのための流量ツインドライブシステムによるデッドゾーン補償法,” 精密工学会誌, vol. 87, no. 9, pp. 759–764, 2021, doi: 10.2493/jjspe.87.759.
12.
大西亘, 藤本博志, 坂田晃一, “大型超精密位置決めステージのモデルベースト制御技術,” 電気学会論文誌D（産業応用部門誌）, vol. 140, no. 4, pp. 272–280, 2020, doi: 10.1541/ieejias.140.272.
11.
大西亘, 藤本博志, 坂田晃一, 鈴木和弘, “冗長アクチュエータの自由度を活かした回転中心・重心点ハイブリッド駆動による精密位置決めステージの非干渉化制御法,” 電気学会論文誌D（産業応用部門誌）, vol. 139, no. 5, pp. 480–487, 2019, doi: 10.1541/ieejias.139.480.
10.
Wataru Ohnishi, Hiroshi Fujimoto, Pai-Hsueh Yang, Ping-Wei Chang, Bausan Yuan, Koichi Sakata, Atsushi Hara, “Acoustic wave equation based modeling and collocated side vibration cancellation for pneumatic cylinder,” IEEJ Journal of Industry Applications, vol. 7, no. 2, pp. 109–116, 2018, doi: 10.1541/ieejjia.7.109.
9.
Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki, “Decoupling control method for high-precision stages using multiple actuators considering the misalignment among the actuation point, center of gravity, and center of rotation,” IEEJ Journal of Industry Applications, vol. 5, no. 2, pp. 141–147, 2016, doi: 10.1541/ieejjia.5.141.
8.
矢崎雄馬, 藤本博志, 堀洋一, 坂田晃一, 原篤史, 佐伯和明, “粗微動間連結分離機構を有する精密位置決めステージの終端状態制御法を用いた整定時間短縮法,” 電気学会論文誌D（産業応用部門誌）, vol. 135, no. 3, pp. 227–236, 2015, doi: 10.1541/ieejias.135.227.
7.
Koichi Sakata, Hiroyoshi Asaumi, Kazuyuki Hirachi, Kazuaki Saiki, Hiroshi Fujimoto, “Self resonance cancellation techniques for a two-mass system and its application to a large-scale stage,” IEEJ Journal of Industry Applications, vol. 3, no. 6, pp. 455–462, 2014, doi: 10.1541/ieejjia.3.455.
6.
Hiroshi Fujimoto, Koichi Sakata, “Multirate PWM control of precision stage for ultrahigh-speed nanoscale positioning,” IEEJ Journal of Industry Applications, vol. 3, no. 3, pp. 270–276, 2014, doi: 10.1541/ieejjia.3.270.
5.
大西亘, 藤本博志, 堀洋一, 坂田晃一, 鈴木和弘, 佐伯和明, “超精密ステージにおけるオイラーの運動方程式と物体座標系の回転の非線形性と軸間干渉を補償した姿勢制御法,” 電気学会論文誌D（産業応用部門誌）, vol. 134, no. 3, pp. 293–300, 2014, doi: 10.1541/ieejias.134.293.
4.
Kazuaki Saiki, Koichi Sakata, Hiroshi Fujimoto, “A study on high-speed and high-precision tracking control of large-scale stage using perfect tracking control method based on multirate feedforward control,” IEEE Transactions on Industrial Electronics, vol. 57, no. 4, pp. 1324–1335, 2010, doi: 10.1109/TIE.2009.2030212.
3.
佐伯和明, 下山隆司, 坂田晃一, 藤本博志, “完全追従制御法を用いた大型ステージのモデルの妥当性検証と精密位置決め制御,” 電気学会論文誌D（産業応用部門誌）, vol. 130, no. 8, pp. 1022–1029, 2010, doi: 10.1541/ieejias.130.1022.
2.
坂田晃一, 藤本博志, 大友剛, 佐伯和明, “ステージ駆動力と表面形状を用いた大型超精密スキャンステージのオートフォーカス/レベリング制御,” 電気学会論文誌D（産業応用部門誌）, vol. 129, no. 6, pp. 564–570, 2009, doi: 10.1541/ieejias.129.564.
1.
坂田晃一, 藤本博志, “電流ループとPWMホールドを考慮した厳密モデルに基づくサーボモータの完全追従制御法,” 電気学会論文誌D（産業応用部門誌）, vol. 127, no. 6, pp. 587–593, 2007, doi: 10.1541/ieejias.127.587.

International Conference Publications (peer-reviewed)

38.
Masahiro Mae, Yu-Pin Hsin, Koichi Sakata, “Frequency response data-driven multi-axis add-on structure feedback controller design applied to 3-DOF high-precision motion system,” in Proc. IEEE international conference on advanced motion control (AMC), Mar. 2026, pp. 1–6, doi: 10.1109/AMC67705.2026.11435856.
37.
Reon Sasaki, Wataru Ohnishi, Pai-Hsueh Yang, Houng-Joong Kim, Koichi Sakata, Takafumi Koseki, “Cn-class target trajectory design for high-speed and high-precision stage control,” in Proc. The 12th IEEJ international workshop on sensing, actuation, and motion control (SAMCON), Mar. 2026, pp. 409–414.
36.
Kosei S. Takeda, Koichi Sakata, “Cn-class target trajectory design for high-speed and high-precision stage control,” in Proc. The 12th IEEJ international workshop on sensing, actuation, and motion control (SAMCON), Mar. 2026, pp. 348–353.
35.
Reon Sasaki, Wataru Ohnishi, Takafumi Koseki, Koichi Sakata, Pai-Hsueh Yang, Gaurav Keswani, Houng-Joong Kim, “State variable dependent disturbances compensation using gaussian process regression: With application to core-type linear motor,” in Proc. IEEE/ASME international conference on advanced intelligent mechatronics (AIM), Jul. 2024, pp. 416–421, doi: 10.1109/AIM55361.2024.10637133.
34.
Takumi Hayashi, Hiroshi Fujimoto, Koichi Sakata, Zhaoxiang Chen, “Primary-side voltage control for high-efficiency operation of wireless high-precision stage,” in Proc. The 9th IEEJ international workshop on sensing, actuation, and motion control (SAMCON), Apr. 2023, pp. 154–159.
33.
Masahiro Mae, Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, “Frequency response data-based multiple peak filter design applied to high-precision stage in translation and pitching,” in Proc. IEEE international conference on advanced motion control (AMC), Feb. 2022, pp. 100–105, doi: 10.1109/AMC51637.2022.9729295.
32.
Pai-Hsueh Yang, Koichi Sakata, Gaurav Keswani, “Coil switching and control of an iron core moving magnet linear motor,” in Proc. 47th annual conference of the IEEE industrial electronics society (IECON), Oct. 2021, pp. 1–6, doi: 10.1109/IECON48115.2021.9589623.
31.
Yui Shirato, Wataru Ohnishi, Hiroshi Fujimoto, Yoichi Hori, Koichi Sakata, Atsushi Hara, “Proposal of anti-windup method of twin drive mass-flow-rate control for pneumatic driving system,” in Proc. The 7th IEEJ international workshop on sensing, actuation, and motion control (SAMCON), Mar. 2021, pp. 226–231.
30.
Masahiro Mae, Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, “Frequency response data-based multiple peak filter design applied to high-precision stage in translation and pitching,” in Proc. The 21st IFAC world congress, Jul. 2020, vol. 53, pp. 8413–8418, doi: 10.1016/j.ifacol.2020.12.1577.
29.
Yuma Yazaki, Wataru Ohnishi, Takehiro Imura, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Zhaoxiang Chen, Kazuhiro Yokoyama, Kazuhiro Suzuki, “Input voltage control scheme for high efficiency operation of multi-axis high-precision wireless powered stage,” in Proc. The 5th IEEJ international workshop on sensing, actuation, and motion control (SAMCON), Mar. 2019, pp. 1–6.
28.
Ryunosuke Katada, Yuma Yazaki, Takehiro Imura, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Zhaoxiang Chen, Kazuhiro Yokoyama, Kazuhiro Suzuki, “Input voltage control scheme for high efficiency operation of multi-axis high-precision wireless powered stage,” in Proc. The 5th IEEJ international workshop on sensing, actuation, and motion control (SAMCON), Mar. 2019, pp. 1–6.
27.
Yuma Yazaki, Wataru Ohnishi, Takehiro Imura, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Zhaoxiang Chen, Kazuhiro Yokoyama, Kazuhiro Suzuki, “Development of multi-axis high-precision stage using multistep wireless power transfer,” in Proc. 44th annual conference of the IEEE industrial electronics society (IECON), Oct. 2018, pp. 4799–4804, doi: 10.1109/IECON.2018.8591153.
26.
Wataru Ohnishi, Hiroshi Fujimoto, Pai-Hsueh Yang, Ping-Wei Chang, Bausan Yuan, Koichi Sakata, Atsushi Hara, “Wave equation based modeling and vibration cancellation for pneumatic cylinder,” in Proc. The 3rd IEEJ international workshop on sensing, actuation, and motion control (SAMCON), Mar. 2017, pp. 1–6.
25.
Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Kazuaki Saiki, “Trajectory tracking control for pneumatic actuated scan stage with time delay compensation,” in Proc. 42nd annual conference of the IEEE industrial electronics society (IECON), Oct. 2016, pp. 5125–5130, doi: 10.1109/IECON.2016.7793764.
24.
Yuma Yazaki, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Kazuaki Saiki, “Reduction of impact force by model prediction and final-state control for a high-precision catapult stage,” in Proc. 42nd annual conference of the IEEE industrial electronics society (IECON), Oct. 2016, pp. 5101–5106, doi: 10.1109/IECON.2016.7793026.
23.
Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki, “Decoupling control by the center of rotation and gravity hybrid-driven method for high-precision scan stage with multiple actuators,” in Proc. IEEE international workshop on advanced motion control (AMC), Apr. 2016, pp. 528–532, doi: 10.1109/AMC.2016.7496404.
22.
Yuma Yazaki, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Kazuaki Saiki, “Application of mode switching control using initial state variables in constraint final-state control to high-precision dual stage,” in Proc. American control conference (ACC), Jul. 2015, pp. 4155–4161, doi: 10.1109/ACC.2015.7171981.
21.
Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki, “Integrated design of mechanism and control for high-precision stages by the interaction index in the direct nyquist array method,” in Proc. American control conference (ACC), Jul. 2015, pp. 2825–2830, doi: 10.1109/ACC.2015.7171163.
20.
Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki, “Proposal of decoupling control method for high-precision stages using multiple actuators considering the misalignment among the actuation point, center of gravity, and center of rotation,” in Proc. The 1st IEEJ international workshop on sensing, actuation, and motion control (SAMCON), Mar. 2015, pp. 1–6.
19.
Koichi Sakata, Hiroyoshi Asaumi, Kazuyuki Hirachi, Kazuaki Saiki, Hiroshi Fujimoto, “Introduction of self resonance cancellation techniques for high bandwidth and vibration suppression of two-mass system,” in Proc. The 1st IEEJ international workshop on sensing, actuation, and motion control (SAMCON), Mar. 2015, pp. 1–6.
18.
Yuma Yazaki, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Kazuaki Saiki, “Settling time shortening method using final state control for high-precision stage with decouplable structure of fine and coarse parts,” in Proc. 40th annual conference of the IEEE industrial electronics society (IECON), Nov. 2014, pp. 2859–2865, doi: 10.1109/IECON.2014.7048914.
17.
Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki, “Design and control of 6-DOF high-precision scan stage with gravity canceller,” in Proc. American control conference (ACC), Jun. 2014, pp. 997–1002, doi: 10.1109/ACC.2014.6859023.
16.
Koichi Sakata, Hiroyoshi Asaumi, Kazuyuki Hirachi, Kazuaki Saiki, Hiroshi Fujimoto, “Frequency separation self-resonance cancellation for vibration suppression control of a large-scale stage using multiple position sensors,” in Proc. 39th annual conference of the IEEE industrial electronics society (IECON), Nov. 2013, pp. 6478–6483, doi: 10.1109/IECON.2013.6700203.
15.
Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki, “Proposal of attitude control for high-precision stage by compensating nonlinearity and coupling of euler’s equation and rotational kinematics,” in Proc. 39th annual conference of the IEEE industrial electronics society (IECON), Nov. 2013, pp. 6533–6538, doi: 10.1109/IECON.2013.6700212.
14.
Koichi Sakata, Hiroshi Fujimoto, Kazuaki Saiki, “Application of perfect tracking control to large-scale high-precision stage,” in Proc. 5th IFAC symposium on mechatronic systems, Sep. 2010, pp. 188–193, doi: 10.3182/20100913-3-US-2015.00068.
13.
Koichi Sakata, Hiroshi Fujimoto, “Proposal of long sampling short cycle observer for quantization error reduction,” in Proc. IEEE international symposium on industrial electronics (ISIE), Jul. 2010, pp. 1919–1924, doi: 10.1109/ISIE.2010.5637528.
12.
Koichi Sakata, Hiroshi Fujimoto, Luca Peretti, Mauro Ziglio, “Enhanced speed and current control of PMSM drives by perfect tracking algorithms,” in Proc. International power electronics conference – ECCE asia (IPEC), Jun. 2010, pp. 587–592, doi: 10.1109/IPEC.2010.5543320.
11.
Koichi Sakata, Hiroshi Fujimoto, Atsushi Hara, Takeshi Ohtomo, Kazuaki Saiki, “Design, fabrication and control of 4-DOF high-precision stage,” in Proc. IEEE international workshop on advanced motion control (AMC), Mar. 2010, pp. 366–370, doi: 10.1109/AMC.2010.5464104.
10.
Koichi Sakata, Hiroshi Fujimoto, “Proposal of multirate PWM positioning control considering resonance mode for precision stage,” in Proc. 35th annual conference of the IEEE industrial electronics society (IECON), Nov. 2009, pp. 3142–3147, doi: 10.1109/IECON.2009.5415307.
9.
Kazuaki Saiki, Takachika Shimoyama, Koichi Sakata, Hiroshi Fujimoto, “Positioning of large-scale high-precision viscoelastic stage based on vibration suppression PTC,” in Proc. 35th annual conference of the IEEE industrial electronics society (IECON), Nov. 2009, pp. 3136–3141, doi: 10.1109/IECON.2009.5415310.
8.
Koichi Sakata, Hiroshi Fujimoto, “Master-slave synchronous position control for precision stages based on multirate control and dead-time compensation,” in Proceedings of the 2009 IEEE/ASME international conference on advanced intelligent mechatronics (AIM), Jul. 2009, pp. 263–268, doi: 10.1109/AIM.2009.5230003.
7.
Koichi Sakata, Hiroshi Fujimoto, Atsushi Hara, Kazuaki Saiki, “Design fabrication of high-precision stage and ultrahigh-speed nanoscale positioning,” in Proceedings of the 2009 american control conference (ACC), Jun. 2009, pp. 2254–2259, doi: 10.1109/ACC.2009.5160031.
6.
Kazuaki Saiki, Kazuyuki Hirachi, Koichi Sakata, Hiroshi Fujimoto, “High-speed and high-precision tracking control of large-scale stage using perfect tracking control with disturbance observer,” in Proc. 34th annual conference of the IEEE industrial electronics society (IECON), Nov. 2008, pp. 2545–2550, doi: 10.1109/IECON.2008.4758357.
5.
Atsushi Hara, Kazuaki Saiki, Koichi Sakata, Hiroshi Fujimoto, “Basic examination on simultaneous optimization of mechanism and control for high precision single axis stage and experimental verification,” in Proc. 34th annual conference of the IEEE industrial electronics society (IECON), Nov. 2008, pp. 2509–2514, doi: 10.1109/IECON.2008.4758351.
4.
Koichi Sakata, Hiroshi Fujimoto, Kazuaki Saiki, “Positioning of large-scale high-precision stage with vibration suppression PTC,” in Proc. 17th IFAC world congress, Jul. 2008, pp. 3124–3129, doi: 10.3182/20080706-5-KR-1001.00531.
3.
Kazuaki Saiki, Atsushi Hara, Koichi Sakata, Hiroshi Fujimoto, “A study on high-speed and high-precision tracking control of large-scale stage using perfect tracking control method based on multirate feedforward control,” in Proc. IEEE int. Workshop on advanced motion control (AMC), Mar. 2008, pp. 206–211, doi: 10.1109/AMC.2008.4516067.
2.
Koichi Sakata, Hiroshi Fujimoto, Takachika Shimoyama, Kazuaki Saiki, “Improvement of fast and precise positioning of large-scale high-precision step-stage based on vibration suppression PTC,” in Proc. IEEE 33rd annu. Conf. Industrial electronics society (IECON), Nov. 2007, pp. 339–344, doi: 10.1109/IECON.2007.4460340.
1.
Koichi Sakata, Hiroshi Fujimoto, “Perfect tracking control of servo motor based on precise model with PWM hold and current loop,” in Proc. IEEE power conversion conference (PCCON), Apr. 2007, pp. 1612–1617, doi: 10.1109/PCCON.2007.373180.

Domestic Conference Publications (non peer-reviewed)

25.
阿久沢駿介, 佐々木怜音, 大西亘, 古関隆章, 坂田晃一, 金弘中, “複数軌道ILCによる成分分離とRBFNNを用いた固定子間欠配置PMLSMの外乱補償,” in 電気学会リニアドライブ/交通・電気鉄道合同研究会, LD-26-004, TER-26-004, Jan. 2026, pp. 17–22.
24.
武田耕生, 坂田晃一, 岡部紘介, 加藤凌, “ステージ制御高速高精度化のための\(C^N\)級目標軌道設計,” in 電気学会メカトロニクス制御研究会, MEC-25-001, Sep. 2025, pp. 1–6.
23.
佐々木怜音, 片山真守, 大西亘, 古関隆章, Yang Pai-Hsueh, Keswani Gaurav, 金弘中, 坂田晃一, “横磁束形リニア同期モータの磁気吸引力能動制御による3自由度駆動ステージの精密制御,” Sep. 2024.
22.
片山真守, 大西亘, 古関隆章, 金弘中, 坂田晃一, “高加速度精密ステージの二次元並進およびヨー同時運動制御のための対向する横磁束形リニア同期モータの設計,” in 2023年電気学会産業応用部門大会, Aug. 2023, pp. ROM:3–36.
21.
片山真守, 古関隆章, 大西亘, 坂田晃一, 金弘中, “非接触精密位置決めステージ高加速度駆動のための横磁束形リニア同期モータの設計,” in 電気学会交通・電気鉄道/リニアドライブ合同研究会, TER-23-023, LD-23-023, Jan. 2023, pp. 11–15.
20.
大西亘, 藤本博志, 坂田晃一, 鈴木一弘, 佐伯和明, “複数アクチュエータの回転中心・重心点ハイブリッド駆動法による超精密ステージの非干渉化制御,” in 平成27年電気学会産業応用部門大会, Sep. 2015, pp. ROM:2–29.
19.
矢崎雄馬, 藤本博志, 坂田晃一, 原篤史, 佐伯和明, “制約付き終端状態制御における初期状態変数を用いたモード切り替え制御及び超精密2段ステージへの適用,” in 電気学会メカトロニクス制御研究会, MEC-14-167, Oct. 2014, pp. 45–50.
18.
大西亘, 藤本博志, 坂田晃一, 鈴木一弘, 佐伯和明, “ナイキスト配列法における干渉指数を用いた超精密ステージの機構と制御の統合設計の提案,” in 電気学会メカトロニクス制御合同研究会, MEC-14-148, Sep. 2014, pp. 1–6.
17.
坂田晃一, 佐伯和明, 藤本博志, “自己共振相殺制御と精密位置決めステージへの応用事例紹介,” in 平成26年電気学会産業応用部門大会, Aug. 2014, pp. ROM:2-S8-4.
16.
矢崎雄馬, 藤本博志, 坂田晃一, 原篤史, 佐伯和明, “粗微動間連結分離機構を有する精密位置決めステージの整定時間短縮制御法の提案,” in 電気学会産業計測制御メカトロニクス制御合同研究会, IIC-14-066, MEC-14-054, Mar. 2014, pp. 61–66.
15.
大西亘, 藤本博志, 坂田晃一, 鈴木一弘, 佐伯和明, “超精密ステージにおける非線形性と軸間干渉を有する回転運動の干渉解析,” in 電気学会メカトロニクス制御研究会, MEC-13-169, Sep. 2013, pp. 61–66.
14.
大西亘, 藤本博志, 坂田晃一, 鈴木一弘, 佐伯和明, “超精密ステージにおけるオイラーの運動方程式の非線形性と軸間干渉を補償した姿勢制御の一提案,” in 電気学会産業計測制御メカトロニクス制御合同研究会, IIC-13-101, MEC-13-101, Mar. 2013, pp. 67–72.
13.
坂田晃一, 佐伯和明, 藤本博志, “ボールねじ駆動ステージにおける複数センサを用いた自己共振相殺制御,” in 平成23年電気学会産業応用部門大会, Sep. 2011, pp. ROM:2–39.
12.
坂田晃一, 藤本博志, 佐伯和明, “超精密ガントリステージにおける複数センサを用いた共振モードにロバストなフィードバック制御器設計,” in 電気学会産業計測制御研究会, IIC-11-065, Mar. 2011, pp. 83–88.
11.
坂田晃一, 藤本博志, “超精密ステージにおける複数センサを用いたフィードバック制御系の高帯域化,” in 第39回制御理論シンポジウム, Sep. 2010, pp. 285–290.
10.
坂田晃一, 藤本博志, 佐伯和明, “大型超精密ステージの位置決め制御のための完全追従制御法の応用,” in 第28回日本ロボット学会学術講演会, Sep. 2010, pp. ROM:1F1–3.
9.
坂田晃一, 藤本博志, “量子化誤差低減のための移動差分ロングサンプリングオブザーバの提案,” in 電気学会産業計測制御研究会, IIC-09-161, Mar. 2009, pp. 19–24.
8.
坂田晃一, 藤本博志, “精密ステージの構造に基づくナノスケールサーボ-共振モードを考慮したマルチレートPWM位置制御の提案-,” in 電気学会産業計測制御研究会, IIC-09-100, Mar. 2009, pp. 59–64.
7.
坂田晃一, 藤本博志, “マルチレート制御とむだ時間補償に基づく精密実験ステージのマスタ・スレーブ同期位置制御,” in 電気学会産業計測制御研究会, IIC-08-161, Sep. 2008, pp. 1–6.
6.
坂田晃一, 藤本博志, 原篤史, 佐伯和明, “超精密ステージの設計製作および超高速ナノスケール位置決めの実験的検証,” in 平成20年電気学会産業応用部門大会, 2-81, Aug. 2008, pp. II.605–II.608.
5.
坂田晃一, 藤本博志, 大友剛, 佐伯和明, “ステージ駆動力と表面形状を用いたスキャンステージのオートフォーカス/レベリング制御の実験的検証,” in 電気学会産業計測制御研究会, IIC-08-44, Mar. 2008, pp. 51–56.
4.
坂田晃一, 藤本博志, 大友剛, 佐伯和明, “マルチレート制御に基づく大型超精密スキャンステージのオートフォーカス/レベリング制御,” in 電気学会産業計測制御研究会, IIC-07-124, Sep. 2007, pp. 47–52.
3.
坂田晃一, 藤本博志, 下山隆司, 佐伯和明, “制振PTCを用いた大型超精密ステップステージの高速・高精度位置決め制御,” in 計測自動制御学会第7回制御部門大会, Mar. 2007, pp. ROM:65-3-1.
2.
坂田晃一, 藤本博志, “PWMホールドモデルに基づくサーボモータの完全追従制御法,” in 平成18年電気学会産業応用部門大会, Mar. 2006, pp. 163–168.
1.
坂田晃一, 藤本博志, “PWMホールドモデルに基づくサーボモータの完全追従制御法,” in 電気学会産業計測制御研究会, IIC-06-62, Mar. 2006, pp. 99–104.

Review Papers

1.
坂田晃一, “FPD露光装置と精密サーボ技術,” 電気学会誌, vol. 137, no. 1, pp. 19–22, 2017, doi: 10.1541/ieejjournal.137.19.

Dissertation

1.
Koichi Sakata, “Multirate control techniques for fast and precise positioning and applications to high-precision stages,” PhD thesis, Yokohama National University, 2011.

Domestic Patents

17.
柳原政光, 坂田晃一, “移動体制御装置及び移動体制御方法,” 特許第7679639号, May 2025.
16.
原篤史, 坂田晃一, 橋場成史, “移動体装置、露光装置、及びデバイス製造方法,” 特許第7472958号, Apr. 2024.
15.
小俣賢治, 坂田晃一, “エンコーダ、駆動装置、ロボット装置、及び制御システム,” 特許第7273379号, May 2023.
14.
小俣賢治, 坂田晃一, “負荷検出用センサ,” 特許第7116373号, Aug. 2022.
13.
小俣賢治, 坂田晃一, “エンコーダ、駆動装置、ロボット装置、制御システム及びその制御方法,” 特許第7068614号, May 2022.
12.
藤本博志, 居村岳広, 佐藤基, 矢崎雄馬, 大西亘, 西村拓朗, 坂田晃一, 原篤史, 長沢昌弥, 陳照祥, 横山和弘, “移動体装置、露光装置、フラットパネルディスプレイの製造方法、およびデバイス製造方法,” 特許第6889534号, May 2021.
11.
パイ-ヒュー・ヤン, ヨン-ジュン・チェ, ピンウェイ・チャン, 坂田晃一, サンディー・リー, “ステージアセンブリ、露光装置、及びプロセス,” 特許第6737346号, Jul. 2020.
10.
坂田晃一, 原篤史, 笹倉伸之, “ピペットホルダ、マイクロマニピュレータ、及びマイクロインジェクションシステム,” 特許第6680993号, Mar. 2020.
9.
坂田晃一, “駆動システム及び駆動方法、露光装置及び露光方法、並びにデバイス製造方法,” 特許第6610719号, Nov. 2019.
8.
坂田晃一, “防振装置、露光装置、及びデバイス製造方法,” 特許第6561192号, Aug. 2019.
7.
坂田晃一, “制御システム及び制御方法、露光装置及び露光方法、並びにデバイス製造方法,” 特許第6536777号, Jun. 2019.
6.
坂田晃一, “駆動システム及び駆動方法、露光装置及び露光方法、並びにデバイス製造方法,” 特許第6362024号, Jul. 2018.
5.
坂田晃一, “駆動システム及び駆動方法、露光装置及び露光方法、並びに防振装置及び防振方法,” 特許第6362019号, Jul. 2018.
4.
佐伯和明, 坂田晃一, “基板貼り合わせ装置及び基板貼り合わせ方法,” 特許第6252976号, Dec. 2017.
3.
佐伯和明, 原篤史, 坂田晃一, “基板貼り合わせ装置及び基板貼り合わせ方法,” 特許第6252975号, Dec. 2017.
2.
坂田晃一, 浅海博圭, “駆動システム及び駆動方法、並びに露光装置及び露光方法,” 特許第6032503号, Nov. 2016.
1.
藤本博志, 佐伯和明, 坂田晃一, “駆動システム及び駆動方法、露光装置及び露光方法、並びに駆動システム設計方法,” 特許第5909451号, Apr. 2016.